FB075 Linear Stage

Additional information

Environment

,

Industry

Resolution

,

Travel Range

, ,

description

The FB075 family of stages is a 75mm wide slide assembly, utilizing Nanomotion’s HR8 motor. Standard travels of 40mm, 60mm, and 100mm are available with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor.

Mechanical Characteristics

Model

FBS075040

FBS075060

FBS075100

Stage Plate Material

Aluminum- Black Anodized

Motor

HR8 Piezo, ultrasonic standing wave

Bearing Type

Precision crossed rollers with anti-migration device

Encoder

Linear optical encoder with gold tape scale

Cable lengths (m)

3m

MTBF (hours)

30,000

Stage Mass

727g

918g

1062g

Carriage Moving Mass

284g

447g

445g

RoSH

Complaint

Vacuum Compatible Options

High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

Performance Specs

Model

FBS075040

FBS075060

FBS075100

Travel Range (mm)

40mm

60mm

100mm

Encoder Resolution

Standard

100nm

Optional

10nm

Bi-directional Repeatability

Standard

1µm

Optional

100nm

Absolute Accuracy (Error mapping available)

Standard

6µm

8µm

10µm

Optional

3µm

4µm

5µm

Minimum Incremental Move Convergence
(encoder & control dependent)

AC Mode

100nm

UHR Mode

5nm

DC Mode

<1nm

Maximum Velocity

200mm/sec

250mm/sec

250mm/sec

Straightness & Flatness

±4µm

±5µm

±5µm

Pitch & Yaw

±40µrad

±60µrad

±60µrad

Load Capacity-Horizontal

3.0kg

3.0kg

3.0kg

Load Capacity-Vertical

0.8kg

0.65kg

0.65kg

Dynamic Stall Force

32N

Motor Stiffness

3N/µm

Holding force without power

28N

downloads

FBS075040

fbs075040-10008.step

fbs075040-10008.x_t

fb0075040-129a-icd.pdf

FBS075060

fbs075060.step

fbs075060.x_t

fb0075060-129a-icd.pdf

FBS075100

fbs075100-10008.step

fbs075100-10008-1.x_t

fb0075100-129a-icd.pdf

PRODUCT MANUAL

FB Positioning Systems User Guide

FBS075-040/060/100 Data Sheet

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