Nanomotion offers an extensive range of standard motion platforms as well as custom designed systems. Applications in the semiconductor, biomedical and optronic industries are served with a range of motor components, sub-system modules and complete motion solutions.
All of Nanomotion’s motion solutions leverage the unique characteristics of our ultrasonic standing wave piezo motors, providing exceptional move & settle performance as well as constant velocity. Our systems can bridge between ultrahigh resolution and high speed, eliminating the need for multiple coarse & fine axes, resulting in a compact, high performance motion system.
Featured Products
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Standard and Vacuum Stages (8)
The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets.
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Standard Edge & Edge-4X Motors (2)
The Edge & Edge-4X motors expands the Nanomotion’s product line of low voltage piezo motors. Ideally suited to miniature motion modules and battery operated devices, the Edge provides force of 0.35N and the Edge-4X provides force of 1.3N.
Both support linear and rotary applications with unlimited travel and optimal size, weight and power.
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Standard HR Motors (4)
Nanomotion’s HR Series motors range in size from a single element to an eight element motor. The HR series is capable of driving both linear and rotary stages. The HR series motors have a wide dynamic range of speed, from several microns per second to 250mm/sec and can easily mount to traditional low friction stages or other devices.
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Custom Motion Solutions (5)
Nanomotion designs and manufactures advanced motion systems for both atmospheric and vacuum environments. Our designs can also support ISO Class 3 cleanliness requirements.
Single and multi-axis stage designs are supported with Nanomotion’s OEM based XCDX controller or on a drive only basis to interface with general purpose motion controllers.
Nanomotion’s engineering team combines extensive experience in motion control and mechanical stage design to provide the optimum solution for non-standard applications.
