Ultra-Precision UHV Stage
for
Semiconductor
Manufacturing
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Nanomotion designs and manufactures advanced motion systems, sub-system modules and piezo motor/drive components.
Based on proprietary ultrasonic standing wave piezoelectric technology, Nanomotion’s motors and motion solutions are suitable for a diversified range of applications from optronics to semiconductor, from medical to metrology and other industrial applications.
Solutions by Market
- Optimized SWaP
- Silent operation
- Lowest power consumption
- Non-magnetic motors for MRI
- Miniature motors for precise fluid dispensing
- FDA compliant drive technology
- Clean Stages for Vacuum & UHV
- Absolute position stability
- Ultra-high resolution positioning
Latest Newsletter Content
Rotary and Linear Shutters are used on a wide range of handheld and flight rated thermal imaging devices…
As the manufacturer of precision ultrasonic piezo motors, we often find ourselves in a situation where 3rd party …
Environmental factors, such as temperature and vibration will often have a negative impact on the performance of …
Events
SPIE Photonics West 2018
Moscone Center
San Francisco, CA
Jan 30 – Feb 1
Booth 4357
SPIE Defense & Commercial Sensing Expo 2018
Gaylord Palms Hotel
Orlando, FL
April 17-19, 2018
Booth: 609
Optatec International
Frankfurt Messe
Frankfurth Germany
May 15-17, 2018
Hall 3, I-17
