Description
The FB075 family of stages is a 75mm wide slide assembly, utilizing Nanomotion’s HR8 motor. Standard travels of 40mm, 60mm, and 100mm are available with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor.
Model | FBS075040 | FBS075060 | FBS075100 |
Stage Plate Material | Aluminum- Black Anodized | ||
Motor | HR8 Piezo, ultrasonic standing wave | ||
Bearing Type | Precision crossed rollers with anti-migration device | ||
Encoder | Linear optical encoder with gold tape scale | ||
Cable lengths (m) | 3m | ||
MTBF (hours) | 30,000 | ||
Stage Mass | 727g | 918g | 1062g |
Carriage Moving Mass | 284g | 447g | 445g |
RoSH | Complaint | ||
Vacuum Compatible Options | High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available | ||
Dynamic Stall Force (in N):
- 40mm travel with HR4 motor: 16N
- 60mm travel with HR4 motor: 16N
- 60mm travel with HR8 motor: 32N
- 100mm travel with HR4 motor:16N
- 100mm travel with HR8 motor: 32N
- 150mm travel with HR4 motor: 16N
- 150mm travel with HR8 motor: 32N
Stage Mass (g):
- 40mm travel with HR4 motor: 650g
- 60mm travel with HR4 motor: 920g
- 60mm travel with HR8 motor: 1035g
- 100mm travel with HR4 motor: 1125g
- 100mm travel with HR8 motor: 1230g
- 150mm travel with HR4 motor: 1515g
- 150mm travel with HR8 motor: 1620g
Moving Mass (g):
- 40mm travel with HR4 motor: 302g
- 60mm travel with HR4 motor: 405g
- 60mm travel with HR8 motor: 412g
- 100mm travel with HR4 motor: 505g
- 100mm travel with HR8 motor: 515g
- 150mm travel with HR4 motor: 710g
- 150mm travel with HR8 motor: 720g
Model | FBS075040 | FBS075060 | FBS075100 | |
Travel Range (mm) | 40mm | 60mm | 100mm | |
Encoder Resolution | Standard | 100nm | ||
Optional | 10nm | |||
Bi-directional Repeatability | Standard | 1µm | ||
Optional | 100nm | |||
Absolute Accuracy (Error mapping available) | Standard | 6µm | 8µm | 10µm |
Optional | 3µm | 4µm | 5µm | |
Minimum Incremental Move Convergence | AC Mode | 100nm | ||
UHR Mode | 5nm | |||
DC Mode | <1nm | |||
Maximum Velocity | 200mm/sec | 250mm/sec | 250mm/sec | |
Straightness & Flatness | ±4µm | ±5µm | ±5µm | |
Pitch & Yaw | ±40µrad | ±60µrad | ±60µrad | |
Load Capacity-Horizontal | 3.0kg | 3.0kg | 3.0kg | |
Load Capacity-Vertical | 0.8kg | 0.65kg | 0.65kg | |
Dynamic Stall Force | 32N | |||
Motor Stiffness | 3N/µm | |||
Holding force without power | 28N | |||
FBS075040
FBS075060
FBS075100
PRODUCT MANUAL
