Additional information
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XCDX5 Motion Controller
The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.
| Environment | |
|---|---|
| Industry | |
| Resolution |
The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.
Model | FRS060-360 |
Stage Plate Material | Aluminum- Black Anodized |
Motor | 2 x HR2 Piezo, ultrasonic standing wave |
Bearing Type | Precision crossed roller rotary bearing |
Encoder | Linear optical encoder with metal ring |
Cable lengths (m) | 3m |
MTBF (hours) | 30,000 |
Stage Mass | 581g |
Moving Mass | 268g |
Moving Inertia | 0.102 gr-m² |
RoSH | Complaint |
Vacuum Compatible Options | High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available |
Model | FRS060360 | |
Travel Range (mm) | n x 360 | |
Encoder Resolution | Standard | 5 arc sec |
Optional | 0.5 arc sec | |
Bi-directional Repeatability | Standard | 50 arc sec |
Optional | 5 arc sec | |
Accuracy | Standard (arc sec) | 10 arc sec |
Optional (arc sec) | 5 arc sec | |
Maximum Velocity | 8.3 rad/sec | |
Flatness | ±5µm | |
Load Inertia Capacity | 0.0035 kg.m² | |
Load Capacity (moment) | 2kg | |
Dynamic Stall Force | 0.96Nm | |
Stage Stiffness | 0.0032 Nm/µrad | |
Holding force without power | 0.86Nm |
