FRS060-360 Rotary Stage

The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.

Additional information

Environment

,

Industry

Resolution

,

Description

The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.

Mechanical Characteristics

Model

FRS060-360

Stage Plate Material

Aluminum- Black Anodized

Motor

2 x HR2 Piezo, ultrasonic standing wave

Bearing Type

Precision crossed roller rotary bearing

Encoder

Linear optical encoder with metal ring

Cable lengths (m)

3m

MTBF (hours)

30,000

Stage Mass

581g

Moving Mass

268g

Moving Inertia

0.102 gr-m²

RoSH

Complaint

Vacuum Compatible Options

High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

Performance Specs

Model

FRS060360

Travel Range (mm)

n x 360

Encoder Resolution

Standard

5 arc sec

Optional

0.5 arc sec

Bi-directional Repeatability

Standard

50 arc sec

Optional

5 arc sec

Accuracy

Standard (arc sec)

10 arc sec

Optional (arc sec)

5 arc sec

Maximum Velocity

8.3 rad/sec

Flatness

±5µm

Load Inertia Capacity

0.0035 kg.m²

Load Capacity (moment)

2kg

Dynamic Stall Force

0.96Nm

Stage Stiffness

0.0032 Nm/µrad

Holding force without power

0.86Nm

Downloads

br013v000-00.step

fbr013v000-00.x_t

fr0060360-129a-icd.pdf

FRS060-360 Data Sheet

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