Additional information
| Environment | |
|---|---|
| Industry | |
| Resolution |
Multi axis stages
| Environment | |
|---|---|
| Industry | |
| Resolution |
|
Model |
FRS060-360 |
|
Stage Plate Material |
Aluminum- Black Anodized |
|
Motor |
2 x HR2 Piezo, ultrasonic standing wave |
|
Bearing Type |
Precision crossed roller rotary bearing |
|
Encoder |
Linear optical encoder with metal ring |
|
Cable lengths (m) |
3m |
|
MTBF (hours) |
30,000 |
|
Stage Mass |
581g |
|
Moving Mass |
268g |
|
Moving Inertia |
0.102 gr-m² |
|
RoSH |
Complaint |
|
Vacuum Compatible Options |
High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available |
|
Model |
FRS060360 |
|
|
Travel Range (mm) |
n x 360 |
|
|
Encoder Resolution |
Standard |
5 arc sec |
|
Optional |
0.5 arc sec |
|
|
Bi-directional Repeatability |
Standard |
50 arc sec |
|
Optional |
5 arc sec |
|
|
Accuracy |
Standard (arc sec) |
10 arc sec |
|
Optional (arc sec) |
5 arc sec |
|
|
Maximum Velocity |
8.3 rad/sec |
|
|
Flatness |
±5µm |
|
|
Load Inertia Capacity |
0.0035 kg.m² |
|
|
Load Capacity (moment) |
2kg |
|
|
Dynamic Stall Force |
0.96Nm |
|
|
Stage Stiffness |
0.0032 Nm/µrad |
|
|
Holding force without power |
0.86Nm |
