Additional information
Environment |
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Environment |
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The FZ080 stage is a precision vertical travel stage based on driving a horizontal wedge. The 80mm square stage utilizes precision crossed rollers for guiding the linear travel, resulting in 10mm travel in the vertical direction. The wedge configuration provides work surface access from any direction, with a precision optical position sensor encoding the directly on the vertical displacement.
Model | FBZ085010 |
Stage Plate Material | Aluminum- Black Anodized |
Motor | HR8 Piezo, ultrasonic standing wave |
Bearing Type | Precision crossed rollers with anti-migration device |
Encoder | Linear optical encoder with gold tape scale |
Cable lengths (m) | 3m |
MTBF (hours) | 30,000 |
Stage Mass | 1300g |
Carriage Moving Mass | 310g |
RoSH | Complaint |
Vacuum Compatible Options | High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available |
Model | FBZ085010 | |
Travel Range | 10mm | |
Encoder Resolution | Standard | 10nm |
Bi-directional Repeatability | Standard | 0.1µm |
Accuracy | Standard | 3µm |
Minimum Incremental Move Convergence (encoder & control dependent) | AC Mode | 100nm |
UHR Mode | 5nm | |
DC Mode | <1nm | |
Maximum Velocity (vertical) | 50mm/sec | |
Straightness & Flatness | ±2µm | |
Pitch & Yaw | ±30µrad | |
Load Capacity | 5kg | |
Dynamic Stall Force (N) | 160N | |
Motor Stiffness (N/µ) | 57N/µm | |
Holding force without power | 150N |