Additional information
| Environment |
|---|
The XCD Series Drive/Control (for Edge & Edge-4X Motors)
| Environment |
|---|
Model | FBZ085010 |
Stage Plate Material | Aluminum- Black Anodized |
Motor | HR8 Piezo, ultrasonic standing wave |
Bearing Type | Precision crossed rollers with anti-migration device |
Encoder | Linear optical encoder with gold tape scale |
Cable lengths (m) | 3m |
MTBF (hours) | 30,000 |
Stage Mass | 1300g |
Carriage Moving Mass | 310g |
RoSH | Complaint |
Vacuum Compatible Options | High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available |
Model | FBZ085010 | |
Travel Range | 10mm | |
Encoder Resolution | Standard | 10nm |
Bi-directional Repeatability | Standard | 0.1µm |
Accuracy | Standard | 3µm |
Minimum Incremental Move Convergence (encoder & control dependent) | AC Mode | 100nm |
UHR Mode | 5nm | |
DC Mode | <1nm | |
Maximum Velocity (vertical) | 50mm/sec | |
Straightness & Flatness | ±2µm | |
Pitch & Yaw | ±30µrad | |
Load Capacity | 5kg | |
Dynamic Stall Force (N) | 160N | |
Motor Stiffness (N/µ) | 57N/µm | |
Holding force without power | 150N |
