FB150 Linear Stage

Additional information

Environment	S (Standard), V (Vacuum)
Industry	Biomedical
Resolution	10 nm, 100 nm
Travel Range	150mm, 200mm

Description

The FB150 family of stages is a 150mm wide slide assembly, utilizing Nanomotion’s HR8 motor. Standard travels of 150mm, and 200mm are available with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor.

Mechanical Characteristics

Model	FBS150150	FBS150200
Stage Plate Material	Aluminum- Black Anodized
Motor	HR8 Piezo, ultrasonic standing wave
Bearing Type	Precision crossed rollers with anti-migration device
Encoder	Linear optical encoder with gold tape scale
Cable lengths (m)	3m
MTBF (hours)	30,000
Stage Mass	4399g	5435g
Carriage Moving Mass	1677g	2054g
RoSH	Complaint
Vacuum Compatible Options	High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

Dynamic Stall Force (in N):

100mm travel with HR8 motor: 32N
150mm travel with HR8 motor: 32N
200mm travel with HR8 motor: 32N

Stage Mass (g):

100mm travel with HR8 motor: 3940g
150mm travel with HR8 motor: 5095g
200mm travel with HR8 motor: 6275g

Moving Mass (g):

100mm travel with HR8 motor: 1600g
150mm travel with HR8 motor: 2125g
200mm travel with HR8 motor: 2660g

Performance Specs

Model		FBS150150	FBS150200
Travel Range (mm)		150mm	200mm
Encoder Resolution	Standard (nm)	100nm	100nm
	Optional (nm)	10nm	10nm
Bi-directional Repeatability	Standard (µm)	1µm	1µm
	Optional (nm)	100nm	100nm
Absolute Accuracy (Error mapping available)	Standard (µm)	12µm	15µm
Absolute Accuracy (Error mapping available)	Optional (nm)	7µm	8µm
Minimum Incremental Move Convergence (encoder & control dependent)	AC Mode	100nm
	UHR Mode	5nm
	DC Mode	<1nm
Maximum Velocity		200mm/sec	200mm/sec
Straightness & Flatness		±5µm	±5µm
Pitch & Yaw		±50µrad	±50µrad
Load Capacity-Horizontal		1.8kg	1.47kg
Load Capacity-Vertical		NA	NA
Dynamic Stall Force		30N	30N
Motor Stiffness		3N/µm	3N/µm
Holding force without power		28N

Performance Specs

Straightness and Flatness: 1.5µm/25mm travel
Maximum Load Capacity (in kg): 20 (100mm travel); 25 (150mm travel); 25 (200mm travel)
Driving Force (in N): 16 (with HR4 motor); 30 (with HR8 motor)
Static Holding Force (in N): 12 (with HR4 motor); 25 (with HR8 motor)

Position Repeatability: