Additional information
Environment | |
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Industry | |
Resolution | |
Travel Range |
Environment | |
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Industry | |
Resolution | |
Travel Range |
The FB150 family of stages is a 150mm wide slide assembly, utilizing Nanomotion’s HR8 motor. Standard travels of 150mm, and 200mm are available with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor.
Model | FBS150150 | FBS150200 |
Stage Plate Material | Aluminum- Black Anodized | |
Motor | HR8 Piezo, ultrasonic standing wave | |
Bearing Type | Precision crossed rollers with anti-migration device | |
Encoder | Linear optical encoder with gold tape scale | |
Cable lengths (m) | 3m | |
MTBF (hours) | 30,000 | |
Stage Mass | 4399g | 5435g |
Carriage Moving Mass | 1677g | 2054g |
RoSH | Complaint | |
Vacuum Compatible Options | High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available |
Model | FBS150150 | FBS150200 | |
Travel Range (mm) | 150mm | 200mm | |
Encoder Resolution | Standard (nm) | 100nm | 100nm |
Optional (nm) | 10nm | 10nm | |
Bi-directional Repeatability | Standard (µm) | 1µm | 1µm |
Optional (nm) | 100nm | 100nm | |
Absolute Accuracy (Error mapping available) | Standard (µm) | 12µm | 15µm |
Optional (nm) | 7µm | 8µm | |
Minimum Incremental Move Convergence (encoder & control dependent) | AC Mode | 100nm | |
UHR Mode | 5nm | ||
DC Mode | <1nm | ||
Maximum Velocity | 200mm/sec | 200mm/sec | |
Straightness & Flatness | ±5µm | ±5µm | |
Pitch & Yaw | ±50µrad | ±50µrad | |
Load Capacity-Horizontal | 1.8kg | 1.47kg | |
Load Capacity-Vertical | NA | NA | |
Dynamic Stall Force | 30N | 30N | |
Motor Stiffness | 3N/µm | 3N/µm | |
Holding force without power | 28N |
Performance Specs
Position Repeatability:
Stage Configurations