Additional information
| Environment | |
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| Industry | |
| Resolution | |
| Travel Range |
XCDX5 Motion Controller
The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.
| Environment | |
|---|---|
| Industry | |
| Resolution | |
| Travel Range |
The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.
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Model |
FBS150150 |
FBS150200 |
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Stage Plate Material |
Aluminum- Black Anodized |
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Motor |
HR8 Piezo, ultrasonic standing wave |
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Bearing Type |
Precision crossed rollers with anti-migration device |
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Encoder |
Linear optical encoder with gold tape scale |
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Cable lengths (m) |
3m |
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MTBF (hours) |
30,000 |
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Stage Mass |
4399g |
5435g |
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Carriage Moving Mass |
1677g |
2054g |
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RoSH |
Complaint |
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Vacuum Compatible Options |
High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available |
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Model |
FBS150150 |
FBS150200 |
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Travel Range (mm) |
150mm |
200mm |
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Encoder Resolution |
Standard (nm) |
100nm |
100nm |
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Optional (nm) |
10nm |
10nm |
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Bi-directional Repeatability |
Standard (µm) |
1µm |
1µm |
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Optional (nm) |
100nm |
100nm |
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Absolute Accuracy (Error mapping available) |
Standard (µm) |
12µm |
15µm |
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Optional (nm) |
7µm |
8µm |
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Minimum Incremental Move Convergence (encoder & control dependent) |
AC Mode |
100nm |
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UHR Mode |
5nm |
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DC Mode |
<1nm |
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Maximum Velocity |
200mm/sec |
200mm/sec |
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Straightness & Flatness |
±5µm |
±5µm |
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Pitch & Yaw |
±50µrad |
±50µrad |
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Load Capacity-Horizontal |
1.8kg |
1.47kg |
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Load Capacity-Vertical |
NA |
NA |
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Dynamic Stall Force |
30N |
30N |
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Motor Stiffness |
3N/µm |
3N/µm |
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Holding force without power |
28N |
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Performance Specs
Position Repeatability:
Stage Configurations
