FB100 Linear Stage

Additional information

Environment	S (Standard), V (Vacuum)
Industry	Biomedical
Resolution	10 nm, 100 nm

Description

The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.

Mechanical Characteristics

Model	FBS100100
Stage Plate Material	Aluminum- Black Anodized
Motor	HR8 Piezo, ultrasonic standing wave
Bearing Type	Precision crossed rollers with anti-migration device
Encoder	Linear optical encoder with gold tape scale
Cable lengths (m)	3m
MTBF (hours)	30,000
Stage Mass	1811g
Carriage Moving Mass	710g
RoSH	Complaint
Vacuum Compatible Options	High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

Dynamic Stall Force (in N):

60mm travel with HR4 motor: 16N
60mm travel with HR8 motor: 32N
100mm travel with HR4 motor:16N
100mm travel with HR8 motor: 32N
150mm travel with HR8 motor: 32N

Stage Mass (g):

60mm travel with HR4 motor: 1580g
60mm travel with HR8 motor: 1690g
100mm travel with HR4 motor: 2040g
100mm travel with HR8 motor: 2145g
150mm travel with HR8 motor: 2625g

Moving Mass (g):

60mm travel with HR4 motor: 690g
60mm travel with HR8 motor: 700g
100mm travel with HR4 motor: 920g
100mm travel with HR8 motor: 930g
150mm travel with HR8 motor: 1160g

Performance Specs

Model		FBS100100
Travel Range (mm)		100mm
Encoder Resolution	Standard	100nm
	Optional	10nm
Bi-directional Repeatability	Standard	1µm
	Optional	100nm
Absolute Accuracy (Error mapping available)	Standard	10µm
Absolute Accuracy (Error mapping available)	Optional	7µm
Minimum Incremental Move Convergence (encoder & control dependent)	AC Mode	100nm
	UHR Mode	5nm
	DC Mode	<1nm
Maximum Velocity		250mm/sec
Straightness & Flatness		±4µm
Pitch & Yaw		±50µrad
Load Capacity-Horizontal		2.7kg
Load Capacity-Vertical		0.4kg
Dynamic Stall Force		32N
Motor Stiffness		3N/µm
Holding force without power		28N

Performance Specs

Straightness and Flatness: 2.5µm/25mm travel
Maximum Load Capacity (in kg): 10 (60mm travel); 12 (100mm travel); 12 (150mm travel
Driving Force (in N): 16 (with HR4 motor); 30 (with HR8 motor)
Static Holding Force (in N): 12 (with HR4 motor); 25 (with HR8 motor)

Position Repeatability: