Additional information
Environment | |
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Industry | |
Resolution |
Environment | |
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Industry | |
Resolution |
The FB100 family of stage is a 100mm wide slide assembly, utilizing Nanomotion’s HR8 motor. Standard travel is 100mm, with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor. Custom travel lengths are available.
Model |
FBS100100 |
Stage Plate Material |
Aluminum- Black Anodized |
Motor |
HR8 Piezo, ultrasonic standing wave |
Bearing Type |
Precision crossed rollers with anti-migration device |
Encoder |
Linear optical encoder with gold tape scale |
Cable lengths (m) |
3m |
MTBF (hours) |
30,000 |
Stage Mass |
1811g |
Carriage Moving Mass |
710g |
RoSH |
Complaint |
Vacuum Compatible Options |
High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available |
Model |
FBS100100 |
|
Travel Range (mm) |
100mm |
|
Encoder Resolution |
Standard |
100nm |
Optional |
10nm |
|
Bi-directional Repeatability |
Standard |
1µm |
Optional |
100nm |
|
Absolute Accuracy (Error mapping available) |
Standard |
10µm |
Optional |
7µm |
|
Minimum Incremental Move Convergence (encoder & control dependent) |
AC Mode |
100nm |
UHR Mode |
5nm |
|
DC Mode |
<1nm |
|
Maximum Velocity |
250mm/sec |
|
Straightness & Flatness |
±4µm |
|
Pitch & Yaw |
±50µrad |
|
Load Capacity-Horizontal |
2.7kg |
|
Load Capacity-Vertical |
0.4kg |
|
Dynamic Stall Force |
32N |
|
Motor Stiffness |
3N/µm |
|
Holding force without power |
28N |
Performance Specs
Position Repeatability:
Stage Configurations