FB050 Linear Stage

The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.

Additional information

Environment

,

Industry

Resolution

,

Travel Range

,

Description

The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.

Mechanical Characteristics

Model

FBS050020

FBS050050

Stage Plate Material

Aluminum- Black Anodized

Motor

HR4 Piezo, ultrasonic standing wave

Bearing Type

Precision crossed rollers with anti-migration device

Encoder

Linear optical encoder with gold tape scale

Cable lengths (m)

3m

MTBF (hours)

30,000

Stage Mass

405g

550g

Carriage Moving Mass

158g

230g

RoSH

Complaint

Vacuum Compatible Options

High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

  • 20mm travel with HR2 motor: 8N
  • 50mm travel with HR2 motor: 8N
  • 20mm travel with HR4 motor: 16N
  • 50mm travel with HR4 motor: 16N
  • 75mm travel with HR4 motor: 16N

Stage Mass (g):

  • 20mm travel with HR2 motor: 385
  • 20mm travel with HR4 motor: 400
  • 50mm travel with HR2 motor: 595
  • 50mm travel with HR4 motor: 610
  • 75mm travel with HR4 motor: 700

Moving Mass (g):

  • 20mm travel with HR2 motor: 150
  • 20mm travel with HR4 motor: 150
  • 50mm travel with HR2 motor: 226
  • 50mm travel with HR4 motor: 226
  • 75mm travel with HR4 motor: 400

Performance Specs

Model

FBS050020

FBS050050

Travel Range (mm)

20mm

50mm

Encoder Resolution

Standard

100nm

Optional

10nm

Bi-directional Repeatability

Standard

1µm

Optional

100nm

Absolute Accuracy (Error mapping available)

Standard

5µm

10µm

Optional

2.5µm

7µm

Minimum Incremental Move Convergence (encoder & control dependent)

AC Mode

100nm

UHR Mode

5nm

DC Mode

<1nm

Maximum Velocity

200mm/sec

200mm/sec

Straightness & Flatness

±4µm

±4µm

Pitch & Yaw

±40µrad

±40µrad

Load Capacity-Horizontal

1.8kg

1.8kg

Load Capacity-Vertical

0.4kg

0.3kg

Dynamic Stall Force

16N

16N

Motor Stiffness

1.7N/µ

1.7N/µ

Holding force without power

14N

Performance Specs

  • Straightness and Flatness: 2.5µm/25mm travel
  • Maximum Load Capacity (in kg): 2 (20mm travel); 5 (50mm travel); 7 (75mm travel)
  • Driving Force (in N): 8 (with HR2 motor); 16 (with HR4 motor)
  • Static Holding Force (in N): 3.5 (with HR2 motor); 12 (with HR4 motor)

Position Repeatability:

  • ±0.5µm with standard 0.1µm encoder
  • ±50nm with optional 10nm encoder
  • ±200nm with optional 50nm encoder
  • ±2µm with optional 0.5µm encoder
  • ±3µm with optional 1.0µm encoder

Stage Configuration

  • Width: 50mm
  • Motor Options: HR2 or HR4
  • Standard Travels: 20mm, 50mm, 75mm
  • Standard Encoder: 0.1µm resolution
  • Optional Encoder Resolutions: 1µm, 0.5µm, 50nm, 10nm
  • Optional limits sensor (the FB050 series is home only)
  • Available Mountings: X/Y, X/Z using angle bracket, X/Y/Z using angle bracket

Downloads

FBS050020

fb050020.step

fb050020.x_t

fb0050020-129a-icd.pdf

FBS050050

fbs050050-10004.step

fbs050050-10004.x_t

fb0050050-129a-icd.pdf

PRODUCT MANUAL

FB Positioning Systems User Guide

FBS050 Series Data Sheet

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