FZ Series Vertical Stage

Description

Description

The FZ080 stage is a precision vertical travel stage based on driving a horizontal wedge. The 80mm square stage utilizes precision crossed rollers for guiding the linear travel, resulting in 10mm travel in the vertical direction. The wedge configuration provides work surface access from any direction, with a precision optical position sensor encoding the directly on the vertical displacement.

Mechanical Characteristics

Model

FBZ085010

Stage Plate Material

Aluminum- Black Anodized

Motor

HR8 Piezo, ultrasonic standing wave

Bearing Type

Precision crossed rollers with anti-migration device

Encoder

Linear optical encoder with gold tape scale

Cable lengths (m)

3m

MTBF (hours)

30,000

Stage Mass

1300g

Carriage Moving Mass

310g

RoSH

Complaint

Vacuum Compatible Options

High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

Performance Specs

Model

FBZ085010

Travel Range

10mm

Encoder Resolution

Standard

10nm

Bi-directional Repeatability

Standard

0.1µm

Accuracy

Standard

3µm

Minimum Incremental Move Convergence (encoder & control dependent)

AC Mode

100nm

UHR Mode

5nm

DC Mode

<1nm

Maximum Velocity (vertical)

50mm/sec

Straightness & Flatness

±2µm

Pitch & Yaw

±30µrad

Load Capacity

5kg

Dynamic Stall Force (N)

160N

Motor Stiffness (N/µ)

57N/µm

Holding force without power

150N

Additional information

Industry