FB150 Linear Stage

Part Number: N/A Category:
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Description

Description

The FB150 family of stages is a 150mm wide slide assembly, utilizing Nanomotion’s HR8 motor. Standard travels of 150mm, and 200mm are available with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor.

Mechanical Characteristics

Model

FBS150150

FBS150200

Stage Plate Material

Aluminum- Black Anodized

Motor

HR8 Piezo, ultrasonic standing wave

Bearing Type

Precision crossed rollers with anti-migration device

Encoder

Linear optical encoder with gold tape scale

Cable lengths (m)

3m

MTBF (hours)

30,000

Stage Mass

4399g

5435g

Carriage Moving Mass

1677g

2054g

RoSH

Complaint

Vacuum Compatible Options

High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

Dynamic Stall Force (in N):

  • 100mm travel with HR8 motor: 32N
  • 150mm travel with HR8 motor: 32N
  • 200mm travel with HR8 motor: 32N

Stage Mass (g):

  • 100mm travel with HR8 motor: 3940g
  • 150mm travel with HR8 motor: 5095g
  • 200mm travel with HR8 motor: 6275g

Moving Mass (g):

  • 100mm travel with HR8 motor: 1600g
  • 150mm travel with HR8 motor: 2125g
  • 200mm travel with HR8 motor: 2660g
Performance Specs

Model

FBS150150

FBS150200

Travel Range (mm)

150mm

200mm

Encoder Resolution

Standard (nm)

100nm

100nm

Optional (nm)

10nm

10nm

Bi-directional Repeatability

Standard (µm)

1µm

1µm

Optional (nm)

100nm

100nm

Absolute Accuracy (Error mapping available)

Standard (µm)

12µm

15µm

Optional (nm)

7µm

8µm

Minimum Incremental Move Convergence (encoder & control dependent)

AC Mode

100nm

UHR Mode

5nm

DC Mode

<1nm

Maximum Velocity

200mm/sec

200mm/sec

Straightness & Flatness

±5µm

±5µm

Pitch & Yaw

±50µrad

±50µrad

Load Capacity-Horizontal

1.8kg

1.47kg

Load Capacity-Vertical

NA

NA

Dynamic Stall Force

30N

30N

Motor Stiffness

3N/µm

3N/µm

Holding force without power

28N

Performance Specs

  • Straightness and Flatness: 1.5µm/25mm travel
  • Maximum Load Capacity (in kg): 20 (100mm travel); 25 (150mm travel); 25 (200mm travel)
  • Driving Force (in N): 16 (with HR4 motor); 30 (with HR8 motor)
  • Static Holding Force (in N): 12 (with HR4 motor); 25 (with HR8 motor)

Position Repeatability:

  • ±0.5µm with standard 0.1µm encoder
  • ±50nm with optional 10nm encoder
  • ±200nm with optional 50nm encoder
  • ±2µm with optional 0.5µm encoder
  • ±3µm with optional 1.0µm encoder

Stage Configurations

  • Width: 150mm
  • Motor Options: HR4 or HR8
  • Standard Travels: 100mm, 150mm, 200mm (option for 300mm travel length)
  • Standard Encoder: 0.1µm resolution
  • Optional Encoder Resolutions: 1µm, 0.5µm, 50nm, 10nm
  • Optional limits and home sensor
  • Available Mountings: X/Y, X/Z using angle bracket, X/Y/Z using angle bracket

Additional information

Industry

Environment

S, V

Travel Range

150 mm, 200 mm

Resolution

10 nm, 100 nm