Description
Stage Configurations
- Width: 150mm
- Motor Options: HR4 or HR8
- Standard Travels: 100mm, 150mm, 200mm (option for 300mm travel length)
- Standard Encoder: 0.1µm resolution
- Optional Encoder Resolutions: 1µm, 0.5µm, 50nm, 10nm
- Optional limits and home sensor
- Available Mountings: X/Y, X/Z using angle bracket, X/Y/Z using angle bracket
Performance Specs
- Straightness and Flatness: 1.5µm/25mm travel
- Maximum Load Capacity (in kg): 20 (100mm travel); 25 (150mm travel); 25 (200mm travel)
- Driving Force (in N): 16 (with HR4 motor); 30 (with HR8 motor)
- Static Holding Force (in N): 12 (with HR4 motor); 25 (with HR8 motor)
Position Repeatability:
- ±0.5µm with standard 0.1µm encoder
- ±50nm with optional 10nm encoder
- ±200nm with optional 50nm encoder
- ±2µm with optional 0.5µm encoder
- ±3µm with optional 1.0µm encoder
Motor Specs
Dynamic Stall Force (in N):
- 100mm travel with HR8 motor: 32N
- 150mm travel with HR8 motor: 32N
- 200mm travel with HR8 motor: 32N
Stage Mass (g):
- 100mm travel with HR8 motor: 3940g
- 150mm travel with HR8 motor: 5095g
- 200mm travel with HR8 motor: 6275g
Moving Mass (g):
- 100mm travel with HR8 motor: 1600g
- 150mm travel with HR8 motor: 2125g
- 200mm travel with HR8 motor: 2660g
