Description
The FB150 family of stages is a 150mm wide slide assembly, utilizing Nanomotion’s HR8 motor. Standard travels of 150mm, and 200mm are available with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor.
Model | FBS150150 | FBS150200 |
Stage Plate Material | Aluminum- Black Anodized | |
Motor | HR8 Piezo, ultrasonic standing wave | |
Bearing Type | Precision crossed rollers with anti-migration device | |
Encoder | Linear optical encoder with gold tape scale | |
Cable lengths (m) | 3m | |
MTBF (hours) | 30,000 | |
Stage Mass | 4399g | 5435g |
Carriage Moving Mass | 1677g | 2054g |
RoSH | Complaint | |
Vacuum Compatible Options | High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available | |
Dynamic Stall Force (in N):
- 100mm travel with HR8 motor: 32N
- 150mm travel with HR8 motor: 32N
- 200mm travel with HR8 motor: 32N
Stage Mass (g):
- 100mm travel with HR8 motor: 3940g
- 150mm travel with HR8 motor: 5095g
- 200mm travel with HR8 motor: 6275g
Moving Mass (g):
- 100mm travel with HR8 motor: 1600g
- 150mm travel with HR8 motor: 2125g
- 200mm travel with HR8 motor: 2660g
Model | FBS150150 | FBS150200 | |
Travel Range (mm) | 150mm | 200mm | |
Encoder Resolution | Standard (nm) | 100nm | 100nm |
Optional (nm) | 10nm | 10nm | |
Bi-directional Repeatability | Standard (µm) | 1µm | 1µm |
Optional (nm) | 100nm | 100nm | |
Absolute Accuracy (Error mapping available) | Standard (µm) | 12µm | 15µm |
Optional (nm) | 7µm | 8µm | |
Minimum Incremental Move Convergence (encoder & control dependent) | AC Mode | 100nm | |
UHR Mode | 5nm | ||
DC Mode | <1nm | ||
Maximum Velocity | 200mm/sec | 200mm/sec | |
Straightness & Flatness | ±5µm | ±5µm | |
Pitch & Yaw | ±50µrad | ±50µrad | |
Load Capacity-Horizontal | 1.8kg | 1.47kg | |
Load Capacity-Vertical | NA | NA | |
Dynamic Stall Force | 30N | 30N | |
Motor Stiffness | 3N/µm | 3N/µm | |
Holding force without power | 28N | ||
Performance Specs
- Straightness and Flatness: 1.5µm/25mm travel
- Maximum Load Capacity (in kg): 20 (100mm travel); 25 (150mm travel); 25 (200mm travel)
- Driving Force (in N): 16 (with HR4 motor); 30 (with HR8 motor)
- Static Holding Force (in N): 12 (with HR4 motor); 25 (with HR8 motor)
Position Repeatability:
- ±0.5µm with standard 0.1µm encoder
- ±50nm with optional 10nm encoder
- ±200nm with optional 50nm encoder
- ±2µm with optional 0.5µm encoder
- ±3µm with optional 1.0µm encoder
Stage Configurations
- Width: 150mm
- Motor Options: HR4 or HR8
- Standard Travels: 100mm, 150mm, 200mm (option for 300mm travel length)
- Standard Encoder: 0.1µm resolution
- Optional Encoder Resolutions: 1µm, 0.5µm, 50nm, 10nm
- Optional limits and home sensor
- Available Mountings: X/Y, X/Z using angle bracket, X/Y/Z using angle bracket
FBS150150
FBS150200
PRODUCT MANUAL
