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This is a 5 axis stage platform consisting from bottom to top, Tip Tilt X Y Z. Nanomotion offers multi-axis motion systems that operate at 5nm encoders resolving moves down to 20nm in step size.

The motion system is also supported with Nanomotion’s AB2 amplifiers, which provide operation in a normal servo mode as well as an ultra-high resolution DC mode, allowing for positioning and motion down to 1 encoder count (5nm). The AB2 supports seamless switching between the two modes for ‘coarse & fine’ motion build into the same axis.