Standard Stages take on challenging performance requirements

Industry News & Application

Motion control applications continue to challenge manufacturers to improve performance, lower costs and reduce delivery times. To meet the increasing demands of precision motion control requirements, leveraging standard “building blocks” can provide an optimal solution in a competitive environment.

While manufactures prefer to avoid the “commodity” label, applications in semiconductor inspection, medical diagnostics and analytical instrumentation can benefit from a diverse offering of standard stages, configurable into unique solutions. Consider a family of standard stages that are offered for normal atmosphere and vacuum environments, provide variation in motor speed/force, and can be configured with position resolution to 10nm. And, in addition to performance, consider that these precision stages provide linear, rotary, Z-wedge vertical, and goniometric tilt axes.

Product Focus

Nanomotion’s FB Series of stages, for vacuum and non-vacuum applications are provided with a range of travels, stages sizes, positioning resolutions, allowing for high performance positioning systems based on standard building blocks.

Atomic Force Microscopy leverages (2) FB150 Standard Linear stages, with position resolution to 50nm and travel to 150mm per axis

Ink Lithography utilizes 5 axis of XYZ-Tip-Tilt with 5nm resolution and 20nm position resolution across a series of standard axes

Ion-beam etching uses FB series vacuum rated stages with 10nm resolution in an XYZ-Tilt configuration.

For a complete understanding of system designs and performance levels, please contact Nanomotion at nano@nanomotion.com or +1 (631)585-3000, or visit www.nanomotion.com.

About

Utilizing proprietary technology, Nanomotion designs and manufactures complete motion solutions from start to finish.

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Standard Stages take on challenging performance requirements

Industry News & Application