XCDX5 Motion Controller
Nanomotion designs and manufactures advanced motion systems, sub-systems modules and piezo motor/drive components. The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets.
These compact stage configurations are provided in both standard atmospheric configurations as well as vacuum versions that can support clean operation to ISO Class 3 cleanliness. The modular design allows for easy mounting of axes, to each other, along with the use of standard angle brackets for Z mounting. All axes utilize precision crossed roller bearings with anti‐migration and optical encoders for precision positioning requirements.
For applications not suitable to standard stage configurations, please feel free to contact Nanomotion’s team of application engineers to learn about our custom stage capabilities.
Nanomotion designs and manufactures advanced motion systems, sub-systems modules and piezo motor/drive components.
The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets.
These compact stage configurations are provided in both standard atmospheric configurations as well as vacuum versions that can support clean operation to ISO Class 3 cleanliness. The modular design allows for easy mounting of axes, to each other, along with the use of standard angle brackets for Z mounting. All axes utilize precision crossed roller bearings with anti‐migration and optical encoders for precision positioning requirements.
For applications not suitable to standard stage configurations, please feel free to contact Nanomotion’s team of application engineers to learn about our custom stage capabilities.
