FG Series Goniometer Stages

The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.

Additional information

Environment

,

Industry

Size

,

Description

The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets. All stages are available in standard and vacuum configurations, in various sizes, yielding required travel and performance criteria.

Mechanical Characteristics

Model

FGS013S125

FGS013S160

Stage Plate Material

Aluminum- Black Anodized

Motor

HR4 Piezo, ultrasonic standing wave

Bearing Type

Precision crossed rollers with anti-migration device

Encoder

Linear optical encoder with gold tape scale

Cable lengths (m)

3m

MTBF (hours)

30,000

Stage Mass

773g

842g

Moving Mass

461g

423g

RoSH

Complaint

Vacuum Compatible Options

High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

Performance Specs

Model

FGS013S125

FGS013S160

Travel Range (deg)

±10°

±10°

Encoder Resolution

Standard

0.171 arc sec

0.134 arc sec

Optional

0.0171 arc sec

0.0134 arc sec

Bi-directional Repeatability

Standard

2 arc sec

2 arc sec

Optional

0.2 arc sec

0.2 arc sec

Minimum Incremental Move Convergence (encoder & control dependent)

AC Mode

0.165 arc sec

0.128 arc sec

UHR Mode

0.0082 arc sec

0.0064 arc sec

DC Mode

0.000165 arc sec

0.000129 arc sec

Maximum Velocity (deg/sec)

110 deg/sec

85 deg/sec

Load Capacity (kg)

3kg

3kg

Inertial Capacity (kg.m²)

0.0512 kg.m²

0.083 kg.m²

Dynamic Stall Force

2040Nm

2600Nm

Motor Stiffness

0.045 N*m/µrad

0.074 N*m/µrad

Holding force without power

1836Nm

2340Nm

Downloads

FGS100125

fbg013s125-00.step

fbg013s125-00.x_t

fbg013s125-00-icd.pdf

FGS100160

fbg013s160-00.step

fbg013s160-00.x_t

fbg013s160-00-icd.pdf

FGS100-125/160 Data Sheet

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