The FB Series of standard stages are driven by Nanomotion’s ultrasonic standing wave piezo motors, providing closed loop, servo motion with an optical encoder. The standard stages provide single and multi‐axis motion performance for a wide range of applications in Semiconductor, Biomedical, and Instrumentation markets.
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FB Series Linear Stages (4)
The FB Series product line is a family of standard, modular linear stages available for single and multi-axis applications. The stage configuration utilizes crossed roller bearings, a linear optical encoder, and our piezo ceramic motors. The stages are offered in a wide range of widths and travel lengths and can be combined in X/Y or X/Y/Z or other multi-axis configurations. Encoder resolutions can be varied to achieve a range of performance criteria and there are different size motors for each cross-section to meet necessary force/acceleration requirements.
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FG Series Goniometer Stages (1)
The FB Series product line is a family of standard, modular linear stages available for single and multi-axis applications. The stage configuration utilizes crossed roller bearings, a linear optical encoder, and our piezo ceramic motors. The stages are offered in a wide range of widths and travel lengths and can be combined in X/Y or X/Y/Z or other multi-axis configurations. Encoder resolutions can be varied to achieve a range of performance criteria and there are different size motors for each cross-section to meet necessary force/acceleration requirements.
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FR Series Rotary Stages (1)
The FR series of rotary stage provides the most compact footprint for precision rotary motion utilizing our piezo ceramic motors, a crossed roller bearing and a non-contact high resolution rotary encoder. A variety of encoder resolutions and motor configurations allows the FRS060 to be configured for different speed, force and positioning requirements down to 1µrad. FRS060 Rotary Stages are available in standard, vacuum and UHV configurations.
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FZ Series Wedge Stages (1)
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FBZ Series Vertical Stages (1)
The FBZ Vertical Stage series provides pure vertical motion, while driving a wedge axis horizontally. The FBZ provides complete access to the top surface of the user interface without having to stand a linear axis up. The top surface is guided with a linear bearing to prevent horizontal displacement and the Z position is encoded with an optical linear encoder for sub-micron positioning.
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