The Elements of Motion Performance - Nanomotion Back to eNewsletters Archive

The Elements of Motion Performance | Custom Piezoelectric Motor Systems


A snapshot of what can be achieved with Nanomotion products

Nanomotion - A Johnson Electric Company
Custom Motion Solutions

The Elements of Motion Performance

Industry Application

Most motion applications contend with a combination system configuration, operating environment, and key elements of the motion performance, all critical to meeting specific needs. The system design must consider all of the elements at the design level to assure success. While some of the basic elements of motion performance are broadcast in product literature and taken for granted, it is essential to define the necessary characteristics for each application.

From Semiconductor to Biomedial, Photonics to Metrology, the trend to reduce size and increase the overall system performance is a common requirement of motion systems. While configurations may vary, here is a snapshot of a few elements and what can be achieved:

Product Focus

Position Repeatability (FBR060 Rotary Stage)

This graph reflects 45,000 moves of 90° and repeating position to ± 1µrad.

Vibration Suppression (Linear XYZ Assembly)

The plot below represents a shock applied to a linear stage. Within 50ms the system is back in original position. (System fn < 100Hz)

(FBR060 Rotary Stage)

The plot below represents a shock applied to a rotary stage with an eccentric load. Prior to the shock, the stage settled to ±0.2µrad. 20msec after the shock, the stage returned to the same position within ±0.2µrad

Move & Settle

The plot below represents a move of 10mm in 300msec, with a load of 0.5kg. The vertical axis represents: RED: Reported Velocity (10mm/sec/division) YELLOW: Reported Position (400nm/division)

The selection of a motion system should take into consideration not only what is required, but what can be achieved, as performance requirements will always present new challenges. The ability to demonstrate and document achievable motion performance characteristics is important and must be factored into the design considerations early in the process.

Below represents a comparison of standard stages that are documented verses what is achievable, based on various system designs.

Performance Characteristics

Standard Nanomotion Stages

Capabilities Developed and Delivered to Customers

Range of travel

Up to 500mm

Up to 500mm


<10 nm/min


Landing Accuracy (encoder dependent)

50 to 300nm





Position Repeatability


To 1nm

Angular Error (Pitch, Yaw, Roll)



Straightness / Flatness

<2.5μm/25mm travel

<250nm/25mm travel

Damping requirements (Stability)


3nm @ 50hz

Smallest Incremental Move









For a complete understanding of system designs and performance levels, please contact Nanomotion by email, call +1 (631) 585-3000, or visit our website.

Motion Solutions By Industry


TFM Motion Simulation Video


Utilizing proprietary technology, Nanomotion designs and manufactures complete motion solutions from start to finish.

Read more about Nanomotion.

Nanomotion Ltd. Mordot HaCarmel Industrial Park HaYetsira Street, PO Box 623 Yokneam 20692

Nanomotion Inc. 1 Comac Loop Suite 14B2 Ronkonkoma, NY 11779

Phone: +1 (800) 821-6266

Email | Website

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