Stages for E-Beam & Ion Beam

Stages for E-Beam & Ion Beam chambers provide multi axis motion for high vacuum and UHV environments. Stages are designed with a wide range of linear and rotary travel and position resolution down to 10nm

Description

Stages for E-Beam & Ion Beam chambers provide multi axis motion for high vacuum and UHV environments. Stages are designed with a wide range of linear and rotary travel and position resolution down to 10nm

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