Meeting the demands of next-generation chips with next generation tools
Nanomotion’s piezoelectric motor technology is revolutionizing the semiconductor industry by enabling sub-nanometer motion capabilities. Our advanced motion systems are designed to perform in high vacuum and clean environments, ensuring precise control and stability for semiconductor applications.
Key Features:
- High Stability and precision
- Advanced Drive Technology such as AC, UHR and DC Modes
- Low Signal-to-Noise Ratio
- Optimized Control Algorithms
- High Stiffness and Dynamic performance of piezo motors
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.25NM Resolution Stage for Semiconductor Metrology
Figure 10. 0.1nm Step Close loop
Figure 2. 0.25nm Stage Performance
