FB100 Linear Stage

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Description

Description

The FB100 family of stage is a 100mm wide slide assembly, utilizing Nanomotion’s HR8 motor. Standard travel is 100mm, with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor. Custom travel lengths are available.

Mechanical Characteristics

Model

FBS100100

Stage Plate Material

Aluminum- Black Anodized

Motor

HR8 Piezo, ultrasonic standing wave

Bearing Type

Precision crossed rollers with anti-migration device

Encoder

Linear optical encoder with gold tape scale

Cable lengths (m)

3m

MTBF (hours)

30,000

Stage Mass

1811g

Carriage Moving Mass

710g

RoSH

Complaint

Vacuum Compatible Options

High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

Dynamic Stall Force (in N):

  • 60mm travel with HR4 motor: 16N
  • 60mm travel with HR8 motor: 32N
  • 100mm travel with HR4 motor:16N
  • 100mm travel with HR8 motor: 32N
  • 150mm travel with HR8 motor: 32N

Stage Mass (g):

  • 60mm travel with HR4 motor: 1580g
  • 60mm travel with HR8 motor: 1690g
  • 100mm travel with HR4 motor: 2040g
  • 100mm travel with HR8 motor: 2145g
  • 150mm travel with HR8 motor: 2625g

Moving Mass (g):

  • 60mm travel with HR4 motor: 690g
  • 60mm travel with HR8 motor: 700g
  • 100mm travel with HR4 motor: 920g
  • 100mm travel with HR8 motor: 930g
  • 150mm travel with HR8 motor: 1160g
Performance Specs

Model

FBS100100

Travel Range (mm)

100mm

Encoder Resolution

Standard

100nm

Optional

10nm

Bi-directional Repeatability

Standard

1µm

Optional

100nm

Absolute Accuracy (Error mapping available)

Standard

10µm

Optional

7µm

Minimum Incremental Move Convergence (encoder & control dependent)

AC Mode

100nm

UHR Mode

5nm

DC Mode

<1nm

Maximum Velocity

250mm/sec

Straightness & Flatness

±4µm

Pitch & Yaw

±50µrad

Load Capacity-Horizontal

2.7kg

Load Capacity-Vertical

0.4kg

Dynamic Stall Force

32N

Motor Stiffness

3N/µm

Holding force without power

28N

Performance Specs

  • Straightness and Flatness: 2.5µm/25mm travel
  • Maximum Load Capacity (in kg): 10 (60mm travel); 12 (100mm travel); 12 (150mm travel
  • Driving Force (in N): 16 (with HR4 motor); 30 (with HR8 motor)
  • Static Holding Force (in N): 12 (with HR4 motor); 25 (with HR8 motor)

Position Repeatability:

  • ±0.5µm with standard 0.1µm encoder
  • ±50nm with optional 10nm encoder
  • ±200nm with optional 50nm encoder
  • ±2µm with optional 0.5µm encoder
  • ±3µm with optional 1.0µm encoder

Stage Configurations

  • Width: 100mm
  • Motor Options: HR4 or HR8
  • Standard Travels: 60mm, 100mm, 150mm (option for 300mm travel length)
  • Standard Encoder: 0.1µm resolution
  • Optional Encoder Resolutions: 1µm, 0.5µm, 50nm, 10nm
  • Optional limits and home sensor
  • Available Mountings: X/Y, X/Z using angle bracket, X/Y/Z using angle bracket

Additional information

Industry

Environment

S, V

Resolution

10 nm, 100 nm