Description
The FB100 family of stage is a 100mm wide slide assembly, utilizing Nanomotion’s HR8 motor. Standard travel is 100mm, with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor. Custom travel lengths are available.
Model | FBS100100 |
Stage Plate Material | Aluminum- Black Anodized |
Motor | HR8 Piezo, ultrasonic standing wave |
Bearing Type | Precision crossed rollers with anti-migration device |
Encoder | Linear optical encoder with gold tape scale |
Cable lengths (m) | 3m |
MTBF (hours) | 30,000 |
Stage Mass | 1811g |
Carriage Moving Mass | 710g |
RoSH | Complaint |
Vacuum Compatible Options | High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available |
Dynamic Stall Force (in N):
- 60mm travel with HR4 motor: 16N
- 60mm travel with HR8 motor: 32N
- 100mm travel with HR4 motor:16N
- 100mm travel with HR8 motor: 32N
- 150mm travel with HR8 motor: 32N
Stage Mass (g):
- 60mm travel with HR4 motor: 1580g
- 60mm travel with HR8 motor: 1690g
- 100mm travel with HR4 motor: 2040g
- 100mm travel with HR8 motor: 2145g
- 150mm travel with HR8 motor: 2625g
Moving Mass (g):
- 60mm travel with HR4 motor: 690g
- 60mm travel with HR8 motor: 700g
- 100mm travel with HR4 motor: 920g
- 100mm travel with HR8 motor: 930g
- 150mm travel with HR8 motor: 1160g
Model | FBS100100 | |
Travel Range (mm) | 100mm | |
Encoder Resolution | Standard | 100nm |
Optional | 10nm | |
Bi-directional Repeatability | Standard | 1µm |
Optional | 100nm | |
Absolute Accuracy (Error mapping available) | Standard | 10µm |
Optional | 7µm | |
Minimum Incremental Move Convergence (encoder & control dependent) | AC Mode | 100nm |
UHR Mode | 5nm | |
DC Mode | <1nm | |
Maximum Velocity | 250mm/sec | |
Straightness & Flatness | ±4µm | |
Pitch & Yaw | ±50µrad | |
Load Capacity-Horizontal | 2.7kg | |
Load Capacity-Vertical | 0.4kg | |
Dynamic Stall Force | 32N | |
Motor Stiffness | 3N/µm | |
Holding force without power | 28N |
Performance Specs
- Straightness and Flatness: 2.5µm/25mm travel
- Maximum Load Capacity (in kg): 10 (60mm travel); 12 (100mm travel); 12 (150mm travel
- Driving Force (in N): 16 (with HR4 motor); 30 (with HR8 motor)
- Static Holding Force (in N): 12 (with HR4 motor); 25 (with HR8 motor)
Position Repeatability:
- ±0.5µm with standard 0.1µm encoder
- ±50nm with optional 10nm encoder
- ±200nm with optional 50nm encoder
- ±2µm with optional 0.5µm encoder
- ±3µm with optional 1.0µm encoder
Stage Configurations
- Width: 100mm
- Motor Options: HR4 or HR8
- Standard Travels: 60mm, 100mm, 150mm (option for 300mm travel length)
- Standard Encoder: 0.1µm resolution
- Optional Encoder Resolutions: 1µm, 0.5µm, 50nm, 10nm
- Optional limits and home sensor
- Available Mountings: X/Y, X/Z using angle bracket, X/Y/Z using angle bracket
