Description
Stage Configurations
- Width: 100mm
- Motor Options: HR4 or HR8
- Standard Travels: 60mm, 100mm, 150mm (option for 300mm travel length)
- Standard Encoder: 0.1µm resolution
- Optional Encoder Resolutions: 1µm, 0.5µm, 50nm, 10nm
- Optional limits and home sensor
- Available Mountings: X/Y, X/Z using angle bracket, X/Y/Z using angle bracket
Performance Specs
- Straightness and Flatness: 2.5µm/25mm travel
- Maximum Load Capacity (in kg): 10 (60mm travel); 12 (100mm travel); 12 (150mm travel
- Driving Force (in N): 16 (with HR4 motor); 30 (with HR8 motor)
- Static Holding Force (in N): 12 (with HR4 motor); 25 (with HR8 motor)
Position Repeatability:
- ±0.5µm with standard 0.1µm encoder
- ±50nm with optional 10nm encoder
- ±200nm with optional 50nm encoder
- ±2µm with optional 0.5µm encoder
- ±3µm with optional 1.0µm encoder
Motor Specs
Dynamic Stall Force (in N):
- 60mm travel with HR4 motor: 16N
- 60mm travel with HR8 motor: 32N
- 100mm travel with HR4 motor:16N
- 100mm travel with HR8 motor: 32N
- 150mm travel with HR8 motor: 32N
Stage Mass (g):
- 60mm travel with HR4 motor: 1580g
- 60mm travel with HR8 motor: 1690g
- 100mm travel with HR4 motor: 2040g
- 100mm travel with HR8 motor: 2145g
- 150mm travel with HR8 motor: 2625g
Moving Mass (g):
- 60mm travel with HR4 motor: 690g
- 60mm travel with HR8 motor: 700g
- 100mm travel with HR4 motor: 920g
- 100mm travel with HR8 motor: 930g
- 150mm travel with HR8 motor: 1160g
