Description
Stage Configurations
- Width: 50mm
- Motor Options: HR2 or HR4
- Standard Travels: 20mm, 50mm, 75mm
- Standard Encoder: 0.1µm resolution
- Optional Encoder Resolutions: 1µm, 0.5µm, 50nm, 10nm
- Optional limits sensor (the FB050 series is home only)
- Available Mountings: X/Y, X/Z using angle bracket, X/Y/Z using angle bracket
Performance Specs
- Straightness and Flatness: 2.5µm/25mm travel
- Maximum Load Capacity (in kg): 2 (20mm travel); 5 (50mm travel); 7 (75mm travel)
- Driving Force (in N): 8 (with HR2 motor); 16 (with HR4 motor)
- Static Holding Force (in N): 3.5 (with HR2 motor); 12 (with HR4 motor)
Position Repeatability:
- ±0.5µm with standard 0.1µm encoder
- ±50nm with optional 10nm encoder
- ±200nm with optional 50nm encoder
- ±2µm with optional 0.5µm encoder
- ±3µm with optional 1.0µm encoder
Motor Specs
- 20mm travel with HR2 motor: 8N
- 50mm travel with HR2 motor: 8N
- 20mm travel with HR4 motor: 16N
- 50mm travel with HR4 motor: 16N
- 75mm travel with HR4 motor: 16N
Stage Mass (g):
- 20mm travel with HR2 motor: 385
- 20mm travel with HR4 motor: 400
- 50mm travel with HR2 motor: 595
- 50mm travel with HR4 motor: 610
- 75mm travel with HR4 motor: 700
Moving Mass (g):
- 20mm travel with HR2 motor: 150
- 20mm travel with HR4 motor: 150
- 50mm travel with HR2 motor: 226
- 50mm travel with HR4 motor: 226
- 75mm travel with HR4 motor: 400
