Description
The FB050 family of stages is a 50mm wide slide assembly, utilizing Nanomotion’s HR4 motor. Standard travels of 20mm and 50mm are available with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor.
Model | FBS050020 | FBS050050 |
Stage Plate Material | Aluminum- Black Anodized | |
Motor | HR4 Piezo, ultrasonic standing wave | |
Bearing Type | Precision crossed rollers with anti-migration device | |
Encoder | Linear optical encoder with gold tape scale | |
Cable lengths (m) | 3m | |
MTBF (hours) | 30,000 | |
Stage Mass | 405g | 550g |
Carriage Moving Mass | 158g | 230g |
RoSH | Complaint | |
Vacuum Compatible Options | High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available | |
- 20mm travel with HR2 motor: 8N
- 50mm travel with HR2 motor: 8N
- 20mm travel with HR4 motor: 16N
- 50mm travel with HR4 motor: 16N
- 75mm travel with HR4 motor: 16N
Stage Mass (g):
- 20mm travel with HR2 motor: 385
- 20mm travel with HR4 motor: 400
- 50mm travel with HR2 motor: 595
- 50mm travel with HR4 motor: 610
- 75mm travel with HR4 motor: 700
Moving Mass (g):
- 20mm travel with HR2 motor: 150
- 20mm travel with HR4 motor: 150
- 50mm travel with HR2 motor: 226
- 50mm travel with HR4 motor: 226
- 75mm travel with HR4 motor: 400
Model | FBS050020 | FBS050050 | |
Travel Range (mm) | 20mm | 50mm | |
Encoder Resolution | Standard | 100nm | |
Optional | 10nm | ||
Bi-directional Repeatability | Standard | 1µm | |
Optional | 100nm | ||
Absolute Accuracy (Error mapping available) | Standard | 5µm | 10µm |
Optional | 2.5µm | 7µm | |
Minimum Incremental Move Convergence (encoder & control dependent) | AC Mode | 100nm | |
UHR Mode | 5nm | ||
DC Mode | <1nm | ||
Maximum Velocity | 200mm/sec | 200mm/sec | |
Straightness & Flatness | ±4µm | ±4µm | |
Pitch & Yaw | ±40µrad | ±40µrad | |
Load Capacity-Horizontal | 1.8kg | 1.8kg | |
Load Capacity-Vertical | 0.4kg | 0.3kg | |
Dynamic Stall Force | 16N | 16N | |
Motor Stiffness | 1.7N/µ | 1.7N/µ | |
Holding force without power | 14N | ||
Performance Specs
- Straightness and Flatness: 2.5µm/25mm travel
- Maximum Load Capacity (in kg): 2 (20mm travel); 5 (50mm travel); 7 (75mm travel)
- Driving Force (in N): 8 (with HR2 motor); 16 (with HR4 motor)
- Static Holding Force (in N): 3.5 (with HR2 motor); 12 (with HR4 motor)
Position Repeatability:
- ±0.5µm with standard 0.1µm encoder
- ±50nm with optional 10nm encoder
- ±200nm with optional 50nm encoder
- ±2µm with optional 0.5µm encoder
- ±3µm with optional 1.0µm encoder
Stage Configuration
- Width: 50mm
- Motor Options: HR2 or HR4
- Standard Travels: 20mm, 50mm, 75mm
- Standard Encoder: 0.1µm resolution
- Optional Encoder Resolutions: 1µm, 0.5µm, 50nm, 10nm
- Optional limits sensor (the FB050 series is home only)
- Available Mountings: X/Y, X/Z using angle bracket, X/Y/Z using angle bracket
FBS050020
FBS050050
PRODUCT MANUAL
