FB050 Linear Stage

Part Number: N/A Category:
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Description

Description

The FB050 family of stages is a 50mm wide slide assembly, utilizing Nanomotion’s HR4 motor. Standard travels of 20mm and 50mm are available with the ability to combine axes for XY or XYZ assemblies. All FB series stages come standard with a 100nm resolution optical position sensor and limits or an optional 10nm resolution optical position sensor.

Mechanical Characteristics

Model

FBS050020

FBS050050

Stage Plate Material

Aluminum- Black Anodized

Motor

HR4 Piezo, ultrasonic standing wave

Bearing Type

Precision crossed rollers with anti-migration device

Encoder

Linear optical encoder with gold tape scale

Cable lengths (m)

3m

MTBF (hours)

30,000

Stage Mass

405g

550g

Carriage Moving Mass

158g

230g

RoSH

Complaint

Vacuum Compatible Options

High Vacuum (to 10-7 Torr) / UHV (to 10-10 Torr) available

  • 20mm travel with HR2 motor: 8N
  • 50mm travel with HR2 motor: 8N
  • 20mm travel with HR4 motor: 16N
  • 50mm travel with HR4 motor: 16N
  • 75mm travel with HR4 motor: 16N

Stage Mass (g):

  • 20mm travel with HR2 motor: 385
  • 20mm travel with HR4 motor: 400
  • 50mm travel with HR2 motor: 595
  • 50mm travel with HR4 motor: 610
  • 75mm travel with HR4 motor: 700

Moving Mass (g):

  • 20mm travel with HR2 motor: 150
  • 20mm travel with HR4 motor: 150
  • 50mm travel with HR2 motor: 226
  • 50mm travel with HR4 motor: 226
  • 75mm travel with HR4 motor: 400
Performance Specs

Model

FBS050020

FBS050050

Travel Range (mm)

20mm

50mm

Encoder Resolution

Standard

100nm

Optional

10nm

Bi-directional Repeatability

Standard

1µm

Optional

100nm

Absolute Accuracy (Error mapping available)

Standard

5µm

10µm

Optional

2.5µm

7µm

Minimum Incremental Move Convergence (encoder & control dependent)

AC Mode

100nm

UHR Mode

5nm

DC Mode

<1nm

Maximum Velocity

200mm/sec

200mm/sec

Straightness & Flatness

±4µm

±4µm

Pitch & Yaw

±40µrad

±40µrad

Load Capacity-Horizontal

1.8kg

1.8kg

Load Capacity-Vertical

0.4kg

0.3kg

Dynamic Stall Force

16N

16N

Motor Stiffness

1.7N/µ

1.7N/µ

Holding force without power

14N

Performance Specs

  • Straightness and Flatness: 2.5µm/25mm travel
  • Maximum Load Capacity (in kg): 2 (20mm travel); 5 (50mm travel); 7 (75mm travel)
  • Driving Force (in N): 8 (with HR2 motor); 16 (with HR4 motor)
  • Static Holding Force (in N): 3.5 (with HR2 motor); 12 (with HR4 motor)

Position Repeatability:

  • ±0.5µm with standard 0.1µm encoder
  • ±50nm with optional 10nm encoder
  • ±200nm with optional 50nm encoder
  • ±2µm with optional 0.5µm encoder
  • ±3µm with optional 1.0µm encoder

Stage Configuration

  • Width: 50mm
  • Motor Options: HR2 or HR4
  • Standard Travels: 20mm, 50mm, 75mm
  • Standard Encoder: 0.1µm resolution
  • Optional Encoder Resolutions: 1µm, 0.5µm, 50nm, 10nm
  • Optional limits sensor (the FB050 series is home only)
  • Available Mountings: X/Y, X/Z using angle bracket, X/Y/Z using angle bracket

Additional information

Industry

Environment

S, V

Travel Range

20 mm, 50 mm

Resolution

10 nm, 100 nm