Motion Solutions for: Semiconductor

To make life easier for us, technologies must become more complex. This complexity comes in large part from companies in the semiconductor industry. From microprocessors to integrated circuits, the semiconductor industry is the engine that drives technology. The semiconductor industry lives by a simple creed: smaller, faster, and cheaper. Nanomotion’s line of motors, available in a wide variety of sizes and suitable for environments from standard ambient up to Ultra High Vacuum, are perfectly suitable to meet all motion requirements for the Semiconductor industry. Nanomotion has built motion platforms for the semiconductor industry to for a wide range of applications, from micro-stages to a 300mm wafer inspection stage.

Multi axis stages for optical wafer inspection and probing. Stages provide with Z-wedge vertical lift stages along with linear and rotary axes.

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Stages for Spectroscopy, both vacuum and non-vacuum, provide multi axis motion in a compact package.

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Stages for electron & ion beam process often require extremely low or no magnetic materials as well as no intrinsic magnetic fields. Nanomotion designs and manufactures linear and rotary stages with non-magnetic bearings, encoders and stage materials for applications that are sensitive to magnetic fields.

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Wafer inspection stages provide travel in X and Y axes to support 450mm diameter wafers. Stages offer absolute position stability at rest with no EMI and built in holding and braking for contact and non-contact measurements.

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Stages for E-Beam & Ion Beam chambers provide multi axis motion for high vacuum and UHV environments. Stages are desgined with a wide range of linear and rotary travel and position resolution down to 10nm

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