Max Velocity: 250mm/sec
Dynamic Stall Force (N): 16
Static Hold Force (N): 14
Static Stiffness (N/µ): 2.8
Preload on Stage (N): 72
Kf Force Constant (N/Volt): 3
Operating Temperature: 0 to 50°C
Storage: -20°C to +70°C
Humidity: 0 to 80%, non-condensing
V vacuum motors: to 10-7 torr after bake out
U ultra-high vacuum motors: to 10-10 torr after bake out
Max Bake Out Temperature: 120°C for V motors, 140°C for U motors