Width: 150mm
Motor Options: HR4 or HR8
Standard Travels: 100mm, 150mm, 200mm (option for 300mm travel length)
Standard Encoder: 0.1µm resolution
Optional Encoder Resolutions: 1µm, 0.5µm, 50nm, 10nm
Optional limits and home sensor
Available Mountings: X/Y, X/Z using angle bracket, X/Y/Z using angle bracket
Straightness and Flatness: 1.5µm/25mm travel
Maximum Load Capacity (in kg): 20 (100mm travel); 25 (150mm travel); 25 (200mm travel)
Driving Force (in N): 16 (with HR4 motor); 30 (with HR8 motor)
Static Holding Force (in N): 12 (with HR4 motor); 25 (with HR8 motor)
Position Repeatability:
±0.5µm with standard 0.1µm encoder
±50nm with optional 10nm encoder
±200nm with optional 50nm encoder
±2µm with optional 0.5µm encoder
±3µm with optional 1.0µm encoder
Dynamic Stall Force (in N):
100mm travel with HR8 motor: 32N
150mm travel with HR8 motor: 32N
200mm travel with HR8 motor: 32N
Stage Mass (g):
100mm travel with HR8 motor: 3940g
150mm travel with HR8 motor: 5095g
200mm travel with HR8 motor: 6275g
Moving Mass (g):
100mm travel with HR8 motor: 1600g
150mm travel with HR8 motor: 2125g
200mm travel with HR8 motor: 2660g