Back to eNewsletters Archive The Elements of Motion Performance | Custom Piezoelectric Motor Systems

A snapshot of what can be achieved with Nanomotion products


Nanomotion - A Johnson Electric Company
Custom Motion Solutions

The Elements of Motion Performance

Industry Application


Most motion applications contend with a combination system configuration, operating environment, and key elements of the motion performance, all critical to meeting specific needs. The system design must consider all of the elements at the design level to assure success. While some of the basic elements of motion performance are broadcast in product literature and taken for granted, it is essential to define the necessary characteristics for each application.

From Semiconductor to Biomedial, Photonics to Metrology, the trend to reduce size and increase the overall system performance is a common requirement of motion systems. While configurations may vary, here is a snapshot of a few elements and what can be achieved:

Position Repeatability
(FBR060 Rotary Stage)

This graph reflects 45,000 moves of 90° and repeating position to ± 1µrad.

Vibration Suppression
(Linear XYZ Assembly)

The plot below represents a shock applied to a linear stage. Within 50ms the system is back in original position. (System fn < 100Hz)

(FBR060 Rotary Stage)

The plot below represents a shock applied to a rotary stage with an eccentric load. Prior to the shock, the stage settled to ±0.2µrad. 20msec after the shock, the stage returned to the same position within ±0.2µrad

Move & Settle

The plot below represents a move of 10mm in 300msec, with a load of 0.5kg. The vertical axis represents:
RED: Reported Velocity (10mm/sec/division)
YELLOW: Reported Position (400nm/division)

The selection of a motion system should take into consideration not only what is required, but what can be achieved, as performance requirements will always present new challenges. The ability to demonstrate and document achievable motion performance characteristics is important and must be factored into the design considerations early in the process.

Below represents a comparison of standard stages that are documented verses what is achievable, based on various system designs.

Performance Characteristics

Standard Nanomotion Stages

Capabilities Developed and Delivered to Customers

Range of travel

Up to 500mm

Up to 500mm

Drift

<10 nm/min

<1nm/min

Landing Accuracy (encoder dependent)

50 to 300nm

20nm

Linearity

±30nm

±1nm

Position Repeatability

<3μm

To 1nm

Angular Error (Pitch, Yaw, Roll)

50μRad

5μRad

Straightness / Flatness

<2.5μm/25mm travel

<250nm/25mm travel

Damping requirements (Stability)

NA

3nm @ 50hz

Smallest Incremental Move

20nm

<4nm

Velocity

250mm/sec

300mm/sec

Stiffness

>300HZ

>300HZ


For a complete understanding of system designs and performance levels, please contact Nanomotion by email, call +1 (631) 585-3000, or visit our website.

Motion Solutions By Industry

TFM Motion Simulation Video

Utilizing proprietary technology, Nanomotion designs and manufactures complete motion solutions from start to finish.

Read more about Nanomotion.

Nanomotion Ltd.
Mordot HaCarmel Industrial Park
HaYetsira Street, PO Box 623
Yokneam 20692

Nanomotion Inc.
1 Comac Loop
Suite 14B2
Ronkonkoma, NY 11779


Phone: +1 (800) 821-6266

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