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When Small Motion Meets Vacuum! | Motion Systems

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Nanomotion: A Johnson Electric Company Advanced Motion Solutions 1-800-821-6266
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Industry Spotlight
Vacuum systems, such as Electron Beam or Ion Beam Microscopes often require compact motion systems that can function under vacuum pressure and operate with a high degree of cleanliness.Vacuum systems, such as Electron Beam or Ion Beam Microscopes often require compact motion systems that can function under vacuum pressure and operate with a high degree of cleanliness. Particularly with small sample sizes, motion systems are finding their way into small vacuum chambers and Dewar assemblies dictating the need for small motors. Multi-axis motion systemThese tools require precision motion, high position stability, good thermal management, and cleanliness to carry out a range of motion in semiconductor and metrology processes. Vacuum and Clean Room Systems require a motion system to yield the following:
Low outgassing to: -TML of <1.0% -CVCM of <0.1% (Tested to ASTM E595-93 standards for outgassing in vacuum and space)
Low or no intrinsic magnetic fields or material.
Low or no particle generation to support cleanliness requirements.
Compatibility to bake out temperatures.
Industry Solution
Product Focus
EDGE Vacuum Motor Edge motor, measuring 13mm long x 7mm wide x 3mm thick.Nanomotion has introduced a vacuum compatible version of its Edge motor, measuring 13mm long x 7mm wide x 3mm thick. This motor, weighing 0.5g, generates 30g force and is vacuum and UHV compatible.closed loop servo motorThe Edge Vacuum motor provides linear or rotary motion and functions as a closed loop servo motor. The motor shown here mounted to a Rotary Evaluation Kit, but vacuum compatible assemblies can be provided with the Edge motor and supported by Nanomotion’s ASIC driver or XCD drive/controller.
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XCD Miniature Drive Control
XCD Demonstrator Watch the video.
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Industries Served
Biomedical & PharmaceuticalSemiconductorSecurityMetrology & PhotonicsData StorageLaboratory & University
About Nanomotion
Utilizing proprietary technology, Nanomotion designs and manufactures complete motion solutions from start to finish. Using our unique ceramic servo motors, drivers and controllers, Nanomotion creates single and multi-axis motion systems that best suit the needs of your application. Nanomotion provides superior motion solutions based both on the level of performance required in today’s marketplace, and future market needs.
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About Nanomtion
Nanomotion Inc.
Nanomotion Ltd. Mordot HaCarmel Industrial Park HaYetsira Street, PO Box 623 Yokneam 20692 Nanomotion Inc. 1 Comac Loop Suite 14B2 Ronkonkoma, NY 11779 Telephone: +1-800-821-6266 Email Website