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While particle generation can be major concern, Nanomotion has invested in both product design and organizational infrastructure to develop a family of “CLEAN STAGES.”
These stages are designed specifically with clean materials and a sealing system that can operate with or without the addition of air suction.
In addition to sealing, Nanomotion has worked to optimize the material of our drive surfaces, with specific alumina tips and drive surfaces to eliminate wear and provide long operating life. This development has been supported with infrastructure in clean rooms and particle counting, always tested in the worst case scenario, vertically with the motor directly above the particle counter.
Material outgassing is of great concern in many applications where vapors can land on optics and impact performance. Both material selection and appropriate cleaning processes are essential to manage outgassing, and in some instances the baking of product is required.
Nanomotion has developed a series of processes to provide the cleanest motion control solutions capable of meeting the most demanding requirements of Semiconductor customers. These processes include material cleaning with:
• Cascading Solvent Immersion
• Ultrasonic bath
In addition to cleaning, a strict baking process is used to assure specific compatibility for vacuum operation.
For linear and rotary stage requirements that can support vacuum and atmospheric requirements without outgassing and particle generation, Nanomotion has the clean room, process controls and infrastructure to assure the cleanest stages produced today.
Email Nanomotion or call (800) 821-6266 for more information